World-Class Resources > Metrology Labs > Analytical & Characterization > SOPRA Spectroscopic Ellipsometer

SOPRA Spectroscopic Ellipsometer

300 mm full wafer stage
Beam diameter - 2 mm x 2 mm
Angle of incidence - 45°-90° (± 0.01°)
Spectral range: 210 - 850 nm - 2 µm UV - visible - NIR

Typical applications: film thickness; material optical constants